An Electrothermally Actuated Micro-Motion Platform with Integrated Piezoelectric Feedback and Its Position Detection Method
Release time:2024-12-18
Hits:
- Disigner of the Invention:
- Chao Jiang, Wenlong Jiao, Yi Li, Senlin Jiang, Huikai Xie
- Type of Patent:
- Invent
- State of Patent:
- Pending patent
- Service Invention or Not:
- no
- Application Date:
- 2024-08-27