A CMOS-MEMS Integrated Electrothermal Micromirror and Fabrication Methods
Release time:2024-12-18
Hits:
- Disigner of the Invention:
- Wenlong Jiao, Yi Li, Xiaodan Mao, Qiangxian Qi, Chao Jiang, Yang Xiang, Yangyang Yan, Lai Long, Senlin Jiang, Huikai Xie
- Type of Patent:
- Invent
- State of Patent:
- Pending patent
- Service Invention or Not:
- no
- Application Date:
- 2024-08-01