Effects of atomic oxygen on the growth of NiO films by reactive magnetron sputtering deposition
Release time:2024-08-19
Hits:
- Journal:
- Vacuum
- First Author:
- Xu Wei
- Co-author:
- Mao Xin,Zhou Nan,Zhang Qing-Yu,Peng Bo,Shen Yu
- Indexed by:
- 源刊论文
- Document Code:
- SVA3LERG2LO0M65BAN8GFTM390B1FALO
- Issue:
- 196
- Translation or Not:
- no
- Date of Publication:
- 2022-02-01