Room-temperature deposition of low H-content SiNx/SiNxOy thin films using a specially designed PECVD system
Release time:2024-08-19
Hits:
- Journal:
- surface & coatings technology
- First Author:
- Xu Wei
- Co-author:
- Tang He-Li,Zhang Qing-Yu,Zhou Nan,Shen Yu
- Indexed by:
- 源刊论文
- Document Code:
- NKG3PGIDC62XYD88HL3DH20ZQO9GA4M3
- Issue:
- 402
- Translation or Not:
- no
- Date of Publication:
- 2020-11-25