PECVD沉积SiNxOy时的等离子体以及与其性质的关系研究
Release time:2024-08-19
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- Affiliation of Participant(s):
- 重庆工商大学
- Leading Scientist:
- Xu Wei
- Supported by:
- 大连理工大学
- Classification of Project:
- 自然科学类
- Nature of Project:
- 横
- Supported by:
- 事业单位委托项目
- Project level:
- 6.横向
- Project Participants:
- YX,周楠
- Project Number:
- RTFLCG2M2QOC2YZ8NL2F3F3OJOS6NIW6
- Classification of Disciplines:
- Physics
- Date of Project Completion:
- 2022-07-30
- Date of Project Initiation:
- 2020-07-15
- Subsidy Amount(ten thousand yuan):
- 40000.0
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