MEMS Fabry-Perot Filter and Fabrication Methods
Release time:2024-12-18
Hits:
- Disigner of the Invention:
- Yi Li, Wenlong Jiao, Chao Jiang, Meirong Li, Senlin Jiang, Huikai Xie
- Type of Patent:
- Invent
- State of Patent:
- Pending patent
- Service Invention or Not:
- no
- Application Date:
- 2024-12-04