基于AlN的电热微镜位置检测方法及技术研究
Release time:2024-12-18
Hits:
- Leading Scientist:
- 江超
- Supported by:
- 北京理工大学重庆微电子研究院
- Classification of Project:
- 自然科学类
- Supported by:
- Other research projects
- Project level:
- Other
- Project Participants:
- 焦文龙，李易，齐强先，毛小丹，向阳，向东，张新超
- Classification of Disciplines:
- Engineering
- First-Level Discipline:
- Electronics Science and Technology
- Date of Project Approval:
- 2024-06-01
- Scheduled completion time:
- 2025-05-31
- Subsidy Amount(ten thousand yuan):
- 45.0
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