沉积氧化物反应磁控溅射工艺不稳定性监测体系构建
Release time:2024-08-19
Hits:
- Affiliation of Participant(s):
- 重庆工商大学
- Leading Scientist:
- Xu Wei
- Supported by:
- 重庆市教育委员会
- Classification of Project:
- 自然科学类
- Nature of Project:
- 纵
- Supported by:
- 市教委自然科学项目
- Project level:
- 4.市教委级
- Project Participants:
- YX,齐高相
- Project Number:
- 9ADB44602636723AE05370001EAC49F0
- Classification of Disciplines:
- Physics
- Date of Project Completion:
- 2022-10-30
- Date of Project Initiation:
- 2019-10-30
- Subsidy Amount(ten thousand yuan):
- 10000.0
- Pre One:基于可规模化方法制备氧化银基纳米多孔薄膜及其光电性质研究